@article{edinger_vacuum-sealed_2023,
	title = {Vacuum-sealed silicon photonic {MEMS} tunable ring resonator with an independent control over coupling and phase},
	volume = {31},
	issn = {1094-4087},
	url = {https://opg.optica.org/abstract.cfm?URI=oe-31-4-6540},
	doi = {10.1364/OE.480219},
	abstract = {Ring resonators are a vital element for filters, optical delay lines, or sensors in silicon photonics. However, reconfigurable ring resonators with low-power consumption are not available in foundries today. We demonstrate an add-drop ring resonator with the independent tuning of round-trip phase and coupling using low-power microelectromechanical ({MEMS}) actuation. At a wavelength of 1540 nm and for a maximum voltage of 40 V, the phase shifters provide a resonance wavelength tuning of 0.15 nm, while the tunable couplers can tune the optical resonance extinction ratio at the through port from 0 to 30 {dB}. The optical resonance displays a passive quality factor of 29 000, which can be increased to almost 50 000 with actuation. The {MEMS} rings are individually vacuum-sealed on wafer scale, enabling reliable and long-term protection from the environment. We cycled the mechanical actuators for more than 4 × 10
              9
              cycles at 100 {kHz}, and did not observe degradation in their response curves. On mechanical resonance, we demonstrate a modulation increase of up to 15 {dB}, with a voltage bias of 4 V and a peak drive amplitude as low as 20 {mV}.},
	pages = {6540},
	number = {4},
	journaltitle = {Optics Express},
	shortjournal = {Opt. Express},
	author = {Edinger, Pierre and Jo, Gaehun and Van Nguyen, Chris Phong and Takabayashi, Alain Yuji and Errando-Herranz, Carlos and Antony, Cleitus and Talli, Giuseppe and Verheyen, Peter and Khan, Umar and Bleiker, Simon J. and Bogaerts, Wim and Quack, Niels and Niklaus, Frank and Gylfason, Kristinn B.},
	urldate = {2023-07-14},
	date = {2023-02-13},
	langid = {english},
}