@article{canto_plasma-enhanced_2021, title = {Plasma-{Enhanced} {Atomic} {Layer} {Deposition} of {Al} $_{\textrm{2}}$ {O} $_{\textrm{3}}$ on {Graphene} {Using} {Monolayer} {hBN} as {Interfacial} {Layer}}, issn = {2365-709X, 2365-709X}, url = {https://onlinelibrary.wiley.com/doi/10.1002/admt.202100489}, doi = {10.1002/admt.202100489}, language = {en}, urldate = {2021-09-20}, journal = {Advanced Materials Technologies}, author = {Canto, Bárbara and Otto, Martin and Powell, Michael J. and Babenko, Vitaliy and O'Mahony, Aileen and Knoops, Harm C. M. and Sundaram, Ravi S. and Hofmann, Stephan and Lemme, Max C. and Neumaier, Daniel}, month = jul, year = {2021}, pages = {2100489}, }