%0 Journal Article
%T Plasma-Enhanced Atomic Layer Deposition of Al <sub>2</sub> O <sub>3</sub> on Graphene Using Monolayer hBN as Interfacial Layer
%P 2100489
%U https://onlinelibrary.wiley.com/doi/10.1002/admt.202100489
%G en
%J Advanced Materials Technologies
%A Canto, Bárbara
%A Otto, Martin
%A Powell, Michael J.
%A Babenko, Vitaliy
%A O'Mahony, Aileen
%A Knoops, Harm C. M.
%A Sundaram, Ravi S.
%A Hofmann, Stephan
%A Lemme, Max C.
%A Neumaier, Daniel
%D 2021-07-26