@article{jo_wafer-level_2022,
	title = {Wafer-level hermetically sealed silicon photonic {MEMS}},
	volume = {10},
	issn = {2327-9125},
	url = {http://opg.optica.org/abstract.cfm?URI=prj-10-2-A14},
	doi = {10.1364/PRJ.441215},
	language = {en},
	number = {2},
	urldate = {2022-01-17},
	journal = {Photonics Research},
	author = {Jo, Gaehun and Edinger, Pierre and Bleiker, Simon J. and Wang, Xiaojing and Takabayashi, Alain Yuji and Sattari, Hamed and Quack, Niels and Jezzini, Moises and Lee, Jun Su and Verheyen, Peter and Zand, Iman and Khan, Umar and Bogaerts, Wim and Stemme, Göran and Gylfason, Kristinn B. and Niklaus, Frank},
	month = feb,
	year = {2022},
	pages = {A14},
}