%0 Journal Article
%T Wafer-level hermetically sealed silicon photonic MEMS
%V 10
%N 2
%P A14
%W https://infoscience.epfl.ch/record/292364
%U http://opg.optica.org/abstract.cfm?URI=prj-10-2-A14
%G en
%J Photonics Research
%A Jo, Gaehun
%A Edinger, Pierre
%A Bleiker, Simon J.
%A Wang, Xiaojing
%A Takabayashi, Alain Yuji
%A Sattari, Hamed
%A Quack, Niels
%A Jezzini, Moises
%A Lee, Jun Su
%A Verheyen, Peter
%A Zand, Iman
%A Khan, Umar
%A Bogaerts, Wim
%A Stemme, Göran
%A Gylfason, Kristinn B.
%A Niklaus, Frank
%D 2022-02-01